Hybrid Systems | NANO-MASTER, Inc.

Hybrid PECVD & PEALD

NANO-MASTER has developed a hybrid PECVD/PEALD system within the same chamber. The NANO-MASTER NLP-4000 is a stand-alone hybrid PECVD/PEALD system for performing plasma-enhanced atomic layer deposition (PEALD) as well as plasma-enhanced chemical vapor deposition (PECVD). Both processes can be performed in a single chamber without any mechanical reconfiguration. It is also capable of depositing a stack of layers of PEALD/PECVD in the same process. It is CE and SEMI Standards-compliant and capable of processing up to 8” wafers. The system is controlled with LabVIEW software and features three-level password-controlled user authorization using a touch-screen monitor. The system is fully automated, safety-interlocked, recipe-driven, with status indicators and graphic and alphanumeric displays.

Hybrid PAALE & PEALD

The NANO-MASTER NLE-4000 is a stand-alone hybrid PAALE/PEALD system for performing plasma-enhanced atomic layer deposition (PEALD) as well as plasma-assisted atomic layer etching (PAALE). Both processes can be performed in a single chamber without any mechanical reconfiguration.