Nano-Master SINGLE WAFER THIN FILM PROCESSING SYSTEMS

 

 

 

Cleaning, Resist Coating/Stripping & Wet Etching
Sputtering
E-Beam Evaporation
Thermal Evaporation
Reactive Ion Etching
Ion Beam Etching
PECVD
Plasma Assisted-MOCVD
Thermal Vacuum Systems
Atomic Layer Deposition
Plasma Cleaning and Ashing
Heated Platens
Distributed Products